Reactive magnetron sputtering of copper, silver, and gold
By J. Pierson, David Wiederkehr, A. Billard. 2005
181 citations recorded by the source corpus.
Subfields: Materials Chemistry, Mechanics of Materials
View Paper: https://www.semanticscholar.org/paper/ba0f65ef742ca234e65e7ad9d2d479127629c4e7