ELECTROCOAGULATION OF CHEMICAL MECHANICAL POLISHING (CMP) WASTEWATER FROM SEMICONDUCTOR FABRICATION

By C. Lai, Sheng H. Lin. 2003

187 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b9d08e1c2dc9378d7c341709236d642a96a7f988

How researchers see this paper

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In Biomedical Engineering

  1. Yan Liu
  2. V. Khandegar
  3. Man Chen
  4. J. Nouri
  5. A. Saroha
  6. Hiwa Hossaini
  7. Mohammad Malakootian
  8. Y. Hao

In Electrical and Electronic Engineering

  1. Yan Liu
  2. V. Khandegar
  3. Man Chen
  4. J. Nouri
  5. A. Saroha
  6. Hiwa Hossaini
  7. Mohammad Malakootian
  8. Y. Hao

In Materials Chemistry

  1. Yan Liu
  2. V. Khandegar
  3. Man Chen
  4. J. Nouri
  5. A. Saroha
  6. Hiwa Hossaini
  7. Mohammad Malakootian
  8. Y. Hao

Citations in the corpus