Self-organized nanopatterning of silicon surfaces by ion beam sputtering

By J. Muñoz-García, L. Vázquez, M. Castro, R. Gago, A. Redondo-Cubero, A. Moreno-Barrado, R. Cuerno. 2014

163 citations recorded by the source corpus.

Subfields: Computational Mechanics, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b94ff73436bac87a6752a13b5d005129ba2be11b