Effects of sputtering power on the properties of ZnO:Ga films deposited by r.f. magnetron-sputtering at low temperature

By Xuhu Yu, Jin Ma, Feng Ji, Yuheng Wang, Xijian Zhang, Chuan-fu Cheng, Hong-lei Ma. 2005

156 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b8ca56c5275ad929062288c66e05819b63775ffe