Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates
By A. Bruno, G. Lange, S. Asaad, K. Enden, N. Langford, Leonardo DiCarlo. 2015
227 citations recorded by the source corpus.
We present microwave-frequency NbTiN resonators on silicon, systematically achieving internal quality factors above 1 M in the quantum regime. We use two techniques to reduce losses associated with two-level systems: an additional substrate surface treatment prior to NbTiN deposition to optimize the metal-substrate interface and deep reactive-ion etching of the substrate to displace the substrate-vacuum interfaces away from high electric fields. The temperature and power dependence of resonator behavior indicate that two-level systems still contribute significantly to energy dissipation, suggesting that more interface optimization could further improve performance.
Subfields: Astronomy and Astrophysics, Atomic and Molecular Physics, and Optics, Condensed Matter Physics
View Paper: https://www.semanticscholar.org/paper/b8a962667d6c53aa8e5c7fc8c4cd2561566016cd
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In Atomic and Molecular Physics, and Optics
- Göran Wendin
- Steven M. Girvin
- Alexandre Blais
- Andreas Wallraff
- A. Grimsmo
- Franco Nori
- Robert J. Schoelkopf
- Michel H. Devoret
In Condensed Matter Physics
Citations in the corpus
- Circuit quantum electrodynamics (2020, background): “As will be discussed below, large quality factors ranging from Q ∼ 103 to 108 can be obtained in the laboratory (Bruno et al., 2015; Frunzio et al., 2005; Reagor et al., 2016).”
- Quantum information processing with superconducting circuits: a review (2016, background): “Nevertheless, there has been a remarkable improve ment of the coherence times of both qubits and resonators during the last five years [48, 150, 188, 189].”