Quantum chemical study of the mechanism of aluminum oxide atomic layer deposition

By Y. Widjaja, C. Musgrave. 2002

183 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b83b59d78e83b706a9c2c6897c084049b32ee661