Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring

By Hsu-ting Huang, F. Terry. 2004

139 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Computational Mechanics, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/b81dcff3777a3faa13f9bf7bd5ac6145a38bcf9a