Compact damping models for laterally moving microstructures with gas-rarefaction effects

By T. Veijola, M. Turowski. 2001

147 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/b7e1ddd0221fbca5a2149cc771fc69d11fdb48dc