A general procedure for thermomechanical calibration of nano/micro-mechanical resonators

By B. Hauer, C. Doolin, Kevin Beach, John Davis. 2013

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Abstract We describe a general procedure to calibrate the detection of a nano/micro-mechanical resonator’s displacement as it undergoes thermal Brownian motion. A brief introduction to the equations of motion for such a resonator is presented, followed by a detailed derivation of the corresponding power spectral density (PSD) function, which is identical in all situations aside from a system-dependent effective mass value. The effective masses for a number of different resonator geometries are determined using both finite element method (FEM) modeling and analytical calculations.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/b7058ee831dcfc93076e4003fb74564ce1b0f11e