Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media

By G. Wingqvist, J. Bjurström, L. Liljeholm, V. Yantchev, I. Katardjiev. 2007

160 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Bioengineering, Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/b5118054b76ea136ee5295e333b61792ae33e7f0