Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

By T. Kitajima. 2000

211 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/b46519068faf13a396475ee5a9e7b0e3151d4bcf