Thin film atomic layer deposition equipment for semiconductor processing

By O. Sneh, R. Clark-Phelps, A. Londergan, J. Winkler, T. Seidel. 2002

260 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b3ba2ada036c8eb6779b81b1216124eeaecf3f7a