Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films

By P. Banerjee, Won-Jae Lee, K. Bae, S. B. Lee, G. Rubloff. 2010

342 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b3670ce5d32e1fd1e5178661590d7753940f6e16