Gas flow effect on global heat transport and melt convection in Czochralski silicon growth

By V. Kalaev, I. Evstratov, Y. Makarov. 2003

134 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b300cafa7cdc0dae37cc9efa981d0caddaa6dbdf