Fundamental Principles of Engineering Nanometrology

By Richard Leach. 2009

297 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/b2db4ff05a2fde5439d13161b5c528d94a3a369d

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. S. Scherer
2. F. Helmli
3. R. Danzl

Citations in the corpus

• Focus Variation – a Robust Technology for High Resolution Optical 3D Surface Metrology (2011, background): “A good overview of surface metrology systems in general and tactile devices in particular can be found in [1].”