Piezoelectric Al1−xScxN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors

By R. Matloub, M. Hadad, A. Mazzalai, N. Chidambaram, G. Moulard, C. Sandu, T. Metzger, Paul Muralt. 2013

143 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b2b4d6a0e5362244136cbbd85ea1e891f94036b4