Helium ion microscopy

By G. Hlawacek, V. Veligura, R. Gastel, B. Poelsema. 2013

271 citations recorded by the source corpus.

Helium Ion Microcopy (HIM) based on Gas Field Ion Sources (GFIS) represents a new ultra high resolution microscopy and nano-fabrication technique. It is an enabling technology that not only provides imagery of conducting as well as uncoated insulating nano-structures but also allows to create these features. The latter can be achieved using resists or material removal due to sputtering. The close to free-form sculpting of structures over several length scales has been made possible by the extension of the method to other gases such as Neon. A brief introduction of the underlying physics as well as a broad review of the applicability of the method is presented in this review.

Subfields: Biomedical Engineering, Computational Mechanics, Structural Biology

View Paper: https://www.semanticscholar.org/paper/b1befcdb9d489960b34c39457187ab3e4e87dd1e