Influence of Oxygen Exposure on the Nucleation of Platinum Atomic Layer Deposition: Consequences for Film Growth, Nanopatterning, and Nanoparticle Synthesis

By A. Mackus, M. Verheijen, N. Leick, A. Bol, W. Kessels. 2013

137 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b0a1bbf8a37075ce615bb5be4b8781a8ed72c6a4