Controlled Scalable Synthesis of Uniform, High-Quality Monolayer and Few-layer MoS2 Films

By Yifei Yu, Chun Li, Yi Liu, Liqin Su, Yong Zhang, Linyou Cao. Scientific Reports, 2013

825 citations recorded by the source corpus.

Two dimensional (2D) materials with a monolayer of atoms represent an ultimate control of material dimension in the vertical direction. Molybdenum sulfide (MoS2) monolayers, with a direct bandgap of 1.8 eV, offer an unprecedented prospect of miniaturizing semiconductor science and technology down to a truly atomic scale. Recent studies have indeed demonstrated the promise of 2D MoS2 in fields including field effect transistors, low power switches, optoelectronics and spintronics. However, device development with 2D MoS2 has been delayed by the lack of capabilities to produce large-area, uniform and high-quality MoS2 monolayers. Here we present a self-limiting approach that can grow high quality monolayer and few-layer MoS2 films over an area of centimeters with unprecedented uniformity and controllability. This approach is compatible with the standard fabrication process in semiconductor industry. It paves the way for the development of practical devices with 2D MoS2 and opens up new avenues for fundamental research.

Subfields: Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b094531ea3af94c584c6a7f78c5cea12c04a767b

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In Materials Chemistry

1. Xing Fan
2. Chen Xu
3. Xuejian Li
4. Jie Sun
5. Miao Zhao
6. Yifeng Fu
7. Jun Deng
8. Qing Zhang

Citations in the corpus

• Synthesis Methods of Two-Dimensional MoS2: A Brief Review (2017, background): “It is argued that using MoCl5 precursors are easier to achieve monolayer MoS2 over large area [50].”