Electrical breakdown and ESD phenomena for devices with nanometer-to-micron gaps

By A. Wallash, L. Levit. SPIE MOEMS-MEMS, 2003

162 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/aff10621dc547974e49389eb366c8bcbfb1a216f

Citations in the corpus

• Vibration and shock reliability of MEMS: modeling and experimental validation (2011, unknown): “and electrostatic discharge [11], radiation damage [12] and”