Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition
By M. Knez, Kornelius Nielsch, L. Niinistö. 2007
814 citations recorded by the source corpus.
Subfields: Electrical and Electronic Engineering, Materials Chemistry
View Paper: https://www.semanticscholar.org/paper/af79fece0eaf5c3eeab4f5943129aea3ee0bb732
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In Electrical and Electronic Engineering
In Materials Chemistry
Citations in the corpus
- An overview on silica aerogels synthesis and different mechanical reinforcing strategies (2014, background): “This can be carried out through the deposition of a desired monomer throughout the pores' surface of an aerogel, by means of chemical vapor deposition (CVD) or atomic layer deposition (ALD) [25,164–166].”