Ozone-Based Atomic Layer Deposition of Alumina from TMA: Growth, Morphology, and Reaction Mechanism

By S. Elliott, G. Scarel, and C. Wiemer, M. Fanciulli, G. Pavia. 2006

177 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/aea4fa95fd78a06012e74f8d377cfc58cb3a73df