Deposition of Silicon Dioxide Films with a Non-Equilibrium Atmospheric-Pressure Plasma Jet

By S. Babayan, J Y Jeong, A. Schütze, V. Tu, M. Moravej, G. Selwyn, R F Hicks. 2001

179 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Radiology, Nuclear Medicine and Imaging, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/ae9b558203f5136eb630a2a4020701db681da682