Defect analysis in thermal nanoimprint lithography

By Y. Hirai, S. Yoshida, N. Takagi. 2003

169 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/ae0774a5fd1d09d1c4a41369a89e7af759d95f53