Evaluation of elastic modulus and hardness of thin films by nanoindentation

By Yeon‐Gil Jung, B. Lawn, M. Martyniuk, Han Huang, Xiao Zhi Hu. 2004

229 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/ad80ab6df9789a11564aa1607d5c01f53f7212da