Atomic layer deposition of ultrathin and conformal Al2O3 films on BN particles

By J. Ferguson, A. Weimer, S. George. 2000

173 citations recorded by the source corpus.

Subfields: Ceramics and Composites, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/ad5f5b4301b6f34c9eee8942898888a476e0bc50