Broadband moth-eye antireflec tion coatings on silicon

By Chih-Hung Sun, Peng Jiang, B. Jiang. 2008

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Growth of vertically aligned ZnO nanorod arrays as anti-reflection layer in silicon solar cell (2010, background): “Recently, versatile SWSs have emerged as promising candidates for AR coatings such as etching with self-aggregated nanodot mask [4,5], moth-eye-like fabrication [6,7], and nanostructures employing oblique-angle deposition methods [8,9].”
Optimization of moth‐eye antireflection schemes for silicon solar cells (2010, background): “Nevertheless, rapidly developing techniques such as nanoimprint lithography (NIL) [29,30], nanosphere lithography [31,32] and even cheaper, maskless etch techniques [17,19] could pave the way for cheap artificial moth-eye arrays over large areas and so provide a commercially feasible as well as a te”
Optical properties of nanostructured materials: a review (2011, background): “The masks are made of silica or polystyrene 33–35 particles directly deposited on silicon.”
Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer (2010, background): “Recently, versatile SWSs have emerged as promising candidates for AR coatings such as etching with self-aggregated nanodot mask [4,5], moth-eye like fabrication [6,7], nanorod fabrication [8–10], and nanostructures employing oblique-angle deposition methods [11,12].”