Materials science and fabrication processes for a new MEMS technology based on ultrananocrystalline diamond thin films

By O. Auciello, J. Birrell, J. Carlisle, J. Gerbi, Xingcheng Xiao, B. Peng, Horacio Espinosa. 2004

184 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/aca9e24de041f3e2d8120237804c12a5defe4740

How researchers see this paper

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In Atomic and Molecular Physics, and Optics

1. T. Jacobs
2. Robert W. Carpick

In Materials Chemistry

1. J. Harrison
2. T. Jacobs
3. Robert W. Carpick

In Mechanics of Materials

1. J. Harrison
2. T. Jacobs
3. Robert W. Carpick

Citations in the corpus

• The Effect of Atomic-Scale Roughness on the Adhesion of Nanoscale Asperities: A Combined Simulation and Experimental Investigation (2013, background): “2 nm, in close agreement with the known structural properties of UNCD [32].”