Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates

By M. Groner, Jeffrey W. Elam, F. Fabreguette, S. George. 2002

653 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/aca6f8743cb6894e672fab5dfad9fbb4cb095c80

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In Electrical and Electronic Engineering

1. Paul V. Braun

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Citations in the corpus

• Embedded cavities and waveguides in three-dimensional silicon photonic crystals (2008, background): “A thin conformal film of amorphous alumina was then grown around the spheres by means of atomic layer depositio”