Interdependence between stress, preferred orientation, and surface morphology of nanocrystalline TiN thin films deposited by dual ion beam sputtering

By G. Abadias, Y. Tse, P. Guérin, V. Pélosin. 2006

134 citations recorded by the source corpus.

Subfields: Condensed Matter Physics, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/ac9d2299edc913e6e5f62bf7af67a6125dc4f952

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