Toward Atomic-Scale Device Fabrication in Silicon Using Scanning Probe Microscopy

By F. Rueß, L. Oberbeck, M. Simmons, K. Goh, A. Hamilton, T. Hallam, S. R. Schofield, N. Curson, R. G. Clark. 2004

153 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/ac61883ca400322d10b50cfde72f19212552fe5c

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. A. Morello
2. Gerhard Klimeck
3. Andrew Dzurak

In Electrical and Electronic Engineering

1. A. Morello
2. Gerhard Klimeck
3. Andrew Dzurak

Citations in the corpus

• Silicon quantum electronics (2012, methodology): “The process of STM hydrogen lithography has since been adapted to realize a complete fabrication strategy for atomic-scale silicon device fabrication (Ruess et al., 2005, 2004; Simmons et al., 2005).”