Interference lithography: a powerful tool for fabricating periodic structures

By C. Lu, R. Lipson. 2010

288 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/ac5e61f7a339413e92915d864115df280d87f8ae