Diagnostics of inductively coupled chlorine plasmas : Measurements of the neutral gas temperature

By V. Donnelly, M. V. Malyshev. 2000

139 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/aaa8a38853f9d57aff038e8114c886657acaa540