Deposition of TiO2 thin films using RF magnetron sputtering method and study of their surface characteristics

By C. Heo, S. Lee, J. Boo. 2005

183 citations recorded by the source corpus.

Subfields: Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/aa756d41589b15c2d750f949515c6b60f409d9db

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In Materials Chemistry

1. Mira Park
2. Soojin Park
3. Bishweshwar Pant

Citations in the corpus

• Recent Advances in TiO2 Films Prepared by Sol-gel Methods for Photocatalytic Degradation of Organic Pollutants and Antibacterial Activities (2019, methodology): “deposition (MOCVD) [39,40], sputtering [41,42], liquid phase deposition (LPD) [43,44],”