Fundamental studies of Au contacts in MEMS RF switches

By S. Patton, J. Zabinski. 2005

208 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/aa2873b737fc0b24b393a6512c68a58a73a82f65