High ε gate dielectrics Gd2O3 and Y2O3 for silicon

By J. Kwo, M. Hong, A. Kortan, K. Queeney, Y. Chabal, J. Mannaerts, T. Boone, J. Krajewski, A. Sergent, J. Rosamilia. 2000

262 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/a992a1935bca7242c5990dc7946d6255559bc422