Application of high-κ gate dielectrics and metal gate electrodes to enable silicon and non-silicon logic nanotechnology

By R. Chau, J. Brask, Supriyo Datta, G. Dewey, M. Doczy, B. Doyle, J. Kavalieros, B. Jin, M. Metz, A. Majumdar and 1 more. 2005

149 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/a8bc6e3d0dfdd7bff360f36a5dae3c6f5e5e3f91