Reactive sputter deposition and properties of Ta x N thin films

By T. Riekkinen, J. Molarius, Tomi Laurila, A. Nurmela, I. Suni, J. Kivilahti. 2002

153 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/a895b505b2414901b6426f84e118a98715780704