{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

By N. Ledermann, Paul Muralt, J. Baborowski, S. Gentil, K. Mukati, M. Cantoni, A. Seifert, N. Setter. 2003

373 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/a88fe47e7c4cd4fdbe4b710820c9c3c04d0b0c87

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Dong Sam Ha
2. Shashank Priya
3. Jungho Ryu
4. Sang-Gook Kim
5. Ronald Polcawich
6. Isaku Kanno
7. Alper Erturk
8. Daniel J. Inman

In Materials Chemistry

1. Shashank Priya
2. Jungho Ryu
3. Ronald Polcawich
4. Isaku Kanno

Citations in the corpus

• A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits (2017, background): “6% (measured on PZT 53/47 [100]-textured 2 μm thin film (Ledermann et al. 2003)).”