A study of the deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining

By A. Joglekar, Hsiao-hua Liu, Greg J. R. Spooner, E. Meyhofer, G. Mourou, A. Hunt. 2003

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Femtosecond laser micromachining in transparent materials (2008, background): “In less than ten years the resolution of surface ablation has improved to enable nanometre-scale precisio”
Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining (2014, background): “Thus, nanometer resolution and precision are possible [38,39].”
Optics in the relativistic regime (2006, background): “At the same intensity level the deterministic character of the damage threshold in a solid is observed Joglekar et al., 2003 .”
Ultrafast Laser Applications in Manufacturing Processes: A State-of-the-Art Review (2019, unknown): “In principle, taking advantage of the threshold effect has no limit in the machining resolution, and features as small as 15 nm have been fabricated [90].”