Error sources in in-plane silicon tuning-fork MEMS gyroscopes

By M. Weinberg, A. Kourepenis. Journal of microelectromechanical systems, 2006

285 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/a7b9b5402c5e744a4a32251b84a6734782577c71

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In Biomedical Engineering

1. Mikko Saukoski
2. Lasse Aaltonen
3. Kari A. I Halonen

Citations in the corpus

• Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing (2013, background): “An uncompensated bias sensitivity on the order of 500(◦/h)/◦C is typical for MEMS gyroscopes [4].”
• Zero-Rate Output and Quadrature Compensation in Vibratory MEMS Gyroscopes (2007, background): “3) Electrical Cross-Coupling in Sensor Element: In electrical cross-coupling [12], the primary resonator excitation signal couples to the secondary resonator detection circuit”