Ion-beam-induced amorphization and recrystallization in silicon

By L. Pelaz, L. Marqués, J. Barbolla. 2004

355 citations recorded by the source corpus.

Subfields: Computational Mechanics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/a77fafacd6857bcd20a643c6ef67a5206c19623c