Fundamentals of microfabrication and nanotechnology

By M. Madou. 2012

190 citations recorded by the source corpus.

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Microneedles for drug and vaccine delivery (2012, background): “However, it was not until the 1990’s that the microelectronics industry provided the microfabrication tools needed to make microneedles suitable for pharmaceutical applications [36].”
Disposable Sensors in Diagnostics, Food, and Environmental Monitoring (2019, background): “Standard materials used in MEMS are silicon, glass (for example, quartz, soda lime, borosilicate), ceramics, and metals, whereas carbon-based materials (such as diamond, carbon nanotubes (CNTs), or graphene) take center stage in fabricating NEMS.”
Engineering Microneedle Patches for Vaccination and Drug Delivery to Skin. (2017, methodology): “, using acid) (75), where the microneedles are fabricated in the plane of a metal sheet.”