Dislocation conversion in 4H silicon carbide epitaxy

By S. Ha, P. Mieszkowski, M. Skowronski, L. Rowland. 2002

208 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/a660bea8dbd90fcbe19adab69e42259f750dd129