Very low-loss distributed X-band and Ka-band MEMS phase shifters using metal-air-metal capacitors

By J. S. Hayden, Gabriel M. Rebeiz. 2003

157 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/a5fd1593b3754eb69049241c353fd0c361193cd9

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Gabriel M. Rebeiz
2. Kamran Entesari
3. Abbas Abbaspour-Tamijani
4. Laurent Dussopt
5. Juo-Jung Hung
6. Jiasheng Hong

In Electrical and Electronic Engineering

1. Laurent Dussopt
2. Gabriel M. Rebeiz
3. Kamran Entesari
4. Abbas Abbaspour-Tamijani
5. Juo-Jung Hung
6. Leo C. Kempel
7. Jiasheng Hong
8. Kamal Sarabandi

Citations in the corpus

• Miniature and tunable filters using MEMS capacitors (2003, unknown): “However, the MEMS capacitors used in this case are high- elements with an estimated of 350‐450 at 21 GHz [ 24 ], and the loading of the resonator reduces by only 10%‐20%.”
• Distributed 2- and 3-bit W-band MEMS phase shifters on glass substrates (2004, methodology): “J.-J. Hung and G. M. Rebeiz are with the Radiation Laboratory, Department of Electrical Engineering and Computer Science, The University of Michigan at Ann Arbor, Ann Arbor, MI 48109-2122 USA (e-mail: jjhung@umich.edu; rebeiz@umich.edu).”
• Switchable low-loss RF MEMS Ka-band frequency-selective surface (2004, background): “5 dB of the loss is due to the dielectric loss [13], [15], 0.”
• A 12-18-GHz three-pole RF MEMS tunable filter (2005, methodology): “The tunable filter is fabricated on a 500- m glass substrate ( and ) using CPW lines and MEMS switches with a standard RF MEMS process developed at The University of Michigan at Ann Arbor [ 12 ].”