High quality ITO thin films grown by dc and RF sputtering without oxygen

By Ocal Tuna, Y. Selamet, G. Aygun, L. Ozyuzer. 2010

287 citations recorded by the source corpus.

Subfields: Condensed Matter Physics, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/a5872eeab67170abe5362a4e021b9a18696252d0