Sub-50 nm period patterns with EUV interference lithography

By H. Solak, Christian David, J. Gobrecht, Victoria Golovkina, F. Cerrina, Sang Ouk Kim, P. Nealey. 2003

181 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Mechanical Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/a57b3f24b9f89feffc624923493adb4addd9c076

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. Zhong Lin Wang
2. Sheng Xu
3. Wenzhuo Wu
4. Chengkuo Lee
5. Long Liu
6. Caofeng Pan
7. Xinge Guo
8. K. Prasad

In Mechanical Engineering

1. Sheng Xu
2. Zhong Lin Wang
3. Chengkuo Lee
4. Long Liu
5. Ian F. Akyildiz
6. Xinge Guo
7. Jun Chen
8. Josep Miquel Jornet

Citations in the corpus

• One-dimensional ZnO nanostructures: Solution growth and functional properties (2011, background): “Other than that, based on laser interference, two-dimensional (2D) [290] or 3D [291] periodic structures could be generated by so-called laser interference lithography.”