Batch-processed vacuum-sealed capacitive pressure sensors

By A. Chavan, K. Wise. 2001

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Generalized parity–time symmetry condition for enhanced sensor telemetry (2018, methodology): “Recently, low-profile wireless sensors based on passive LC oscillating circuitry (typically a series RLC tank) have been used to measure pressure [5],[6], strain [7], drug delivery [8], temperature, and chemical reactions [1].”
A wireless microsystem for the remote sensing of pressure, temperature, and relative humidity (2005, background): “The absolute pressure sensors use a bulk-micromachined bossed-diaphragm structure along with a vacuum-sealed reference cavity formed by a etch-stop and a recess in the silicon wafer [ 15 ].”
Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “Not only micro- and nanolithography has been the main driving technology in the semiconductor and IC industry, it also plays an increasingly important role in manufacturing of commercial microelectromechanical system (MEMS) devices [45-50] as well as prototype fabrication in emerging nanoscale scien”