Area-Selective ALD with Soft Lithographic Methods: Using Self-Assembled Monolayers to Direct Film Deposition

By Xirong Jiang, S. Bent. 2009

143 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/a340649d8bc665374221cfc8104ee0bbb808ba3e