Evaluation of phase, composition, microstructure and properties in TiC/a-C:H thin films deposited by magnetron sputtering

By W. Gulbiński, S. Mathur, H. Shen, T. Suszko, A. Gilewicz, B. Warcholiński. 2005

154 citations recorded by the source corpus.

Subfields: Materials Chemistry, Mechanical Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/a31053c5335d57eebb33ccc28e19249aefc714c1